ADHESION SYSTEM FOR OPTICAL PELLICLE

摘要

PROBLEM TO BE SOLVED: To provide the improved system for fitting an independent pellicle film to a pellicle frame. SOLUTION: This system has a method for assembling an optical pellicle having a pellicle frame 12 and a pellicle film 14. By this method, an adhesive 19 is applied to the pellicle frame 12 first and a solvent of the adhesive 19 is allowed to vaporize. The solvent is added to the adhesive 19 on the pellicle frame 12, and the pellicle film 14 is fitted to the adhesive 19 on the pellicle frame. In the said step wherein the solvent is allowed to vaporize, the pellicle frame 12 is normally heated together with the adhesive 19 on the pellicle frame by raising the temperature. Further, the adhesive becomes sticky once the solvent is applied to the adhesive 19 on the pellicle frame and the pellicle film 19 is fitted to a proper place. After the pellicle frame 14 is fitted to the adhesive on the pellicle frame, a process wherein the pellicle film 14 and adhesive 19 are made to generate heat and the pellicle film 14 is bonded to the pellicle frame 12 can be added to the said process.