发明名称 MANUFACTURE OF COMPOUND SEMICONDUCTOR
摘要 PROBLEM TO BE SOLVED: To provide a compound semiconductor having a large area at a low cost by using a simple means. SOLUTION: A film of paste, composed of indium selenide powder, selenium powder, copper chloride powder, and a binder is formed on a molybdenum film on a substrate by screen printing the paste or a film of another paste, composed of the indium selenide powder, the selenium powder, and the binder is formed on a molybdenum film and a copper film successively formed on the substrate by screen-printing the paste. Then a CIS(copper-indium selenide) thin film is formed by heating the applied paste in a vacuum, inert gas atmosphere, or mixed gas prepared by mixing a reducing gas in an inert gas, after drying the paste.
申请公布号 JPH10229208(A) 申请公布日期 1998.08.25
申请号 JP19970146388 申请日期 1997.06.04
申请人 YAZAKI CORP 发明人 MOCHIZUKI NORIO;SATO KENJI;IKETANI TAKESHI;TOYODA KAZUHIRO;KAMIYA TAKESHI;NAKAGAWA SHINICHI;NAKAMURA MASAMI;SUZUKI KAZUE
分类号 H01L31/04 主分类号 H01L31/04
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