| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stack structure not necessary to insulate electrically the pipes to connect the intermediate holder and not necessary to hold being capable of moving up-and-down by means of the effect of bellows, and also to be capable of equalizing the surface pressure of upper stack and lower stack. SOLUTION: The intermediate holder 13 is equipped between the upper and lower stacks 11, 12, and the holding stacks 6 fastened between the intermediate holder 13 and upper and lower holder, process gas makes flow in and out from the intermediate holder. In addition, the fastening plate 14 located upward of the upper holder 11 being opposite to the lower holder 12, the connection rods 15 connecting the fastening plate and the lower holder through the intermediate holder with a gap, and the widening devices 16 (e.g. air bellows) being between the fastening plate and the upper holder and making pressurize to the stacks are equipped. The intermediate holder 13 is fixed to the stationary part 17 and connected to one of a positive electrode (+) or a negative electrode (-) and the upper and the lower holders are connected the other polarity of the electrode.</p> |
