| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compsn. which is enough suitable for light in a specified wavelength region and has high sensitivity for light and excellent storage stability by selecting a protective group (acid decomposable group) for an alkali- soluble group which is decomposed by the effect of an acid. SOLUTION: This compsn. contains a resin having an ester group expressed by a formula in the molecule and a compd. which produces an acid by irradiation of active rays or radiation. In the formula, R1 is a hydrogen atom, alkyl group or cycloalkyl group, R2 and R3 may be same or different and are hydrogen atoms, alkyl groups, cycloalkyl groups or -A-R4 , and R2 and R3 may be bonded to form a ring. R4 is a hydrogen atom, alkyl group or cycloalkyl group, and R4 and R2 or R4 and R3 may be bonded to form a ring. A is an oxygen atom or sulfur atom. Thereby, the obtd. compsn. is enough suitable for light in 170 to 220nm wavelength region and has high sensitivity for light and excellent storage stability. |
