| 摘要 |
PROBLEM TO BE SOLVED: To quickly and accurately position the top end of a bonding tool at a target position and write a stable loop at a high speed by adjusting the thrust by a swing corrector according to the thrust variation of a swing drive. SOLUTION: An oscillating drive 8 moves the rear end of a swing arm 2 up and down in a linear motor system. An oscillating corrector 9 adjacent to the drive 8 is mounted on the final end of the arm 2 to move its rear end up and down in the linear motor system, so as to mutually cancel an over- and under-thrust of the drive 8 caused due to the difference in slide resistance, e.g. roll bearings supporting a rotary shaft 3b. This makes it possible to quickly and accurately position the top end of a bonding tool at a target position and write a stable loop at a high speed. |
