| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanner having the satisfactory maneuverability without producing strain on the detecting picture image of a sample. SOLUTION: A spindle 27 receives power from a needle 23 of a voice coil motor to scan a scanner part consisting of a thin pipe part 14, thick pipe part 15 and the like in the x, y directions. A mechanical zoom switch 52 is provided in the interior with a low melting point metal and connects a spring 51 for the zoom to the spindle 27 when the metal is solidified. Thus, the spring constant of the spring for the zoom is added to the spring constant of the thin pipe part 14 to generate the zoom action. On the other hand, when heat is applied to the switch 52 from a heating coil, the low melting point metal is softened to separate the spring 51 for the zoom from the spindle 27. Since the low melting point metal is used for the switch 52, the switch 52 can be rapidly changed over to improve the maneuverability of a zoom mechanism. |
