| 摘要 |
PROBLEM TO BE SOLVED: To obtain a device by which a sample conveyed in a closed state by a closed container can be easily and surely carried in, and carried out from, a chamber such as a treatment chamber or the like at a semiconductor treatment apparatus by a method wherein an opening and shutting part at a chamber used to carry in and out the sample is connected to an opening and shutting part at a conveyable closed container and the sample is carried in, and carried out, through respective openings in both opening and shutting parts. SOLUTION: First opening and shutting parts through which a sample can be carried in, and carried out, and which close respective chambers 1, 3a to 3c used to carry in and out the sample when they are closed are installed at the chambers. In addition, a second opening and shutting part which can carry in and out the sample is installed on one side face of a conveyable closed container which can house the sample. In addition, a coupling means which couples the second opening and shutting part at the closed container to every first opening and shutting part in a state that the second opening and shutting part at the closed container is positioned to every first opening and shutting part is installed. Then, in a state that every first opening and shutting part is coupled to the second opening and shutting part by the coupling means, every first opening and shutting part and the second opening and shutting part are opened, the sample is carried in and out with reference to the closed container through the opening parts in every first opening and shutting part and the second opening and shutting part. |
