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发明名称
SEMICONDUCTOR TEST DEVICE
摘要
申请公布号
JPH10221406(A)
申请公布日期
1998.08.21
申请号
JP19970019199
申请日期
1997.01.31
申请人
TOSHIBA MICROELECTRON CORP;TOSHIBA CORP
发明人
KATAYAMA MOTOYUKI;NAKAMURA MASASHI
分类号
G01R35/00;G01R31/28;(IPC1-7):G01R31/28
主分类号
G01R35/00
代理机构
代理人
主权项
地址
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