TABLE DEVICE AND PLASMA PROCESSOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a table device and plasma processor using the same capable of controlling temperature excellently without destructing a processed body even under low pressure. SOLUTION: A table device 17 for temperature-controlling a processed body to be processed inside a chamber 11 is to be equipped with a table main body 19 wherein the shape of a mounting surface 20 is formed in a recessed and curved shape, a temperature control means 21 provided inside the table main body 19 for controlling the temperature of the mounting surface 20, as well as a clamping means 26 provided on the mounting surface 20 side of the table main body 19 tightly pressing the processed body 18 against the mounting surface 20.