BURIAL GROWTH DEVICE,申请号JP19970028609-传众专利搜索

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发明名称	BURIAL GROWTH DEVICE
摘要
申请公布号	JPH10223535(A)	申请公布日期	1998.08.21
申请号	JP19970028609	申请日期	1997.02.13
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	HAYASHI SHIGEO;SUGANO HIROSHI;NISHITANI TERU
分类号	C30B23/08;H01L21/203;(IPC1-7):H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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