发明名称 |
FLUID CONTROL DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a fluid control device which facilitates work for mounting and dismounting adjusting apparatus such as mass flow controllers. SOLUTION: A gate shaped metal fitting 21 is attached to connection members 4 and 16 to be connected to the overhanging sections 9 and 10 of a mass flow controller 5 so as to hold the connection members between the right and left sides. The gate shaped metal fitting 21 is provided with a pressing body 22 for pressing the overhanging sections 9 and 10 of the mass flow controller 5 against the connection members 4 and 16 from a position directly above a sealing section 18.</p> |
申请公布号 |
JPH10220698(A) |
申请公布日期 |
1998.08.21 |
申请号 |
JP19970186580 |
申请日期 |
1997.07.11 |
申请人 |
NIPPON AERA KK;FUJIKIN:KK |
发明人 |
NAKAZAWA MASAHIKO;TSUKADA KAZUO;YAMAJI MICHIO;TANAKA HISASHI |
分类号 |
F17D1/02;G05D7/00;(IPC1-7):F17D1/02 |
主分类号 |
F17D1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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