发明名称 FLUID CONTROL DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a fluid control device which facilitates work for mounting and dismounting adjusting apparatus such as mass flow controllers. SOLUTION: A gate shaped metal fitting 21 is attached to connection members 4 and 16 to be connected to the overhanging sections 9 and 10 of a mass flow controller 5 so as to hold the connection members between the right and left sides. The gate shaped metal fitting 21 is provided with a pressing body 22 for pressing the overhanging sections 9 and 10 of the mass flow controller 5 against the connection members 4 and 16 from a position directly above a sealing section 18.</p>
申请公布号 JPH10220698(A) 申请公布日期 1998.08.21
申请号 JP19970186580 申请日期 1997.07.11
申请人 NIPPON AERA KK;FUJIKIN:KK 发明人 NAKAZAWA MASAHIKO;TSUKADA KAZUO;YAMAJI MICHIO;TANAKA HISASHI
分类号 F17D1/02;G05D7/00;(IPC1-7):F17D1/02 主分类号 F17D1/02
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