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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10223754(A)
申请公布日期
1998.08.21
申请号
JP19970019142
申请日期
1997.01.31
申请人
SANYO ELECTRIC CO LTD
发明人
NOMA TAKASHI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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