| 摘要 |
PROBLEM TO BE SOLVED: To increase the degree of freedom in the arrangement of an excitation energy beam light source and of a X-ray optical equipment and to reduce the influence of electromagnetic noises generated from the excitation energy beam light source without being subjected to the influence of vibration and exposing an operator to an excitation energy beam. SOLUTION: In this generator, a light source part 100 of an excitation energy beam is fixed to a first vibration control system, and a vacuum container isolated from the first vibration control system is fixed to a second vibration control system. A light conducting member 3 is provided so that the excitation energy beam ejected from the light source part 100 can be transmitted from the first vibration control system to the second vibration control system without escaping and substantially being subjected to the influence of vibration. An incoming radiation end of the light conducting member 3 is fixed to the first vibration control system to maintain a definite positional relationship with the light source part 100, and an outgoing radiation end of the light conducting member 3 is fixed to the second vibration control system to maintain a definite positional relationship with a target member. |
