| 摘要 |
PROBLEM TO BE SOLVED: To obtain a probe pin which has stable long life by forming the major constituent of a probe pin of tungsten containing a predetermined proportion of rhenium. SOLUTION: Tungsten powder and rhenium powder are mixed so that the content of rhenium may be in the range of 3-30wt.%. The mixed powder is shaped into a rod, provisionally sintered, and sintered by the passage of electric current in a non-oxidizing atmosphere. Rolling and hammering process and wire drawing process are applied on the sintered body to obtain a predetermined wire rod. After straightening process, cutting, plating, tip bending process, polishing, and prober assembling, the wire rod is processed into a probe pin in the shape of a subject. The speed of wire drawing in the wire drawing process is approximately 1.2-1.5 times faster than that in regular tungsten process, and the hardness of a probe pin is approximately 800HV or more. In addition, the time for mixing powder raw materials is approximately 10 times longer than before, and the Young's modulus of a probe pin is approximately 3.7×10<5> N/mm or more. Through the use of an inspecting device equipped with a probe pin manufactured in this method, it is possible to perform satisfactory measurement.
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