| 摘要 |
PROBLEM TO BE SOLVED: To perform post-bake simulation at high speed by calculating a fast Fourier transformed inhibitor concentration distribution, calculating the Fourier transform product of a transformed inhibitor concentration distribution and a Gaussian distribution, and then subjecting the product to inverse fast Fourier transform. SOLUTION: If the boundary conditions of initial inhibitor concentration distribution in the lateral direction represent a reflective boundary after setting a diffusion lengthσ(step 1), the data is turned over lateraliy at the boundary and extended by an extent of 3σ(steps 2, 3). The data is then turned over in the depth direction of initial concentration distribution at the boundary and extended by an extent of 3σ(step 4) before an extended inhibitor concentration distribution m is subjected to fast Fourier transform FFT (step 5). Subsequently, the product M'=M×G of a transformed inhibitor concentration distribution M and a Gaussian distribution Fourier transform G is calculated (step 6) and the M' is subjected to inverse fast Fourier transform (step 7). According to the method, calculation time is made constant and shortened significantly.
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