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发明名称
METHOD AND DEVICE FOR FLATTENING SUBSTRATE
摘要
申请公布号
JPH10223579(A)
申请公布日期
1998.08.21
申请号
JP19970028948
申请日期
1997.02.13
申请人
TOSHIBA CORP
发明人
KOJIMA KATSUYOSHI
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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