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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10223786(A)
申请公布日期
1998.08.21
申请号
JP19970033084
申请日期
1997.01.31
申请人
TEXAS INSTR JAPAN LTD
发明人
NAKAYAMA YOSHIMITSU
分类号
H01L21/316;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/78;(IPC1-7):H01L21/824;H01L21/822
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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