| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely correct a bulkhead missing section, improve product yield and reduce manufacturing cost by locally coating the bulkhead missing section with a liquid material forming a glass, and heating it with laser radiation. SOLUTION: A glass pipette 13 filled with a liquid material 33 is moved to a bulkhead missing section with a manipulator 15, while a stage 9 is moved, and the surface of a back glass substrate 2 is observed with a television camera 21 and a monitor 22. The glass pipette 13, inclined at the angle of about 30 deg. with respect to the bottom face of the bulkhead missing section is brought into contact with the end of the bulkhead mission section and warped, and the shift quantity of its tip in the monitor 22 is made constant, to keep the contact state constant. A liquid material 33 which is a glass paste, preferably made of spin-on glass or fine grains of SiO2 and an organic binder, is pushed by nitrogen having a pressure set by an injector 17 and is applied to the bulkhead missing section. The liquid material 33 is made into glass by the heat of the laser beam from a CO2 laser oscillator 11, after the stage 9 has been moved below an objective lens 29.</p> |
