| 摘要 |
<p>This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket (10) encloses and supports a red phosphorus crucible (12), a condensing crucible for white phosphorus (14) and a connecting tube (16) within a vacuum space (19). In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section (20) where it is cracked and subsequently directed to the substrate.</p> |
