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发明名称
Vorrichtung und Verfahren zur transversalen Positionsmessung für Nah-Abstand-Lithographiesysteme
摘要
申请公布号
DE69128771(T2)
申请公布日期
1998.08.20
申请号
DE19916028771T
申请日期
1991.10.07
申请人
HOLTRONIC TECHNOLOGIES LTD., LONDON, GB
发明人
CLUBE, FRANCIS S.M., CH-2000-NEUCHATEL, CH
分类号
G03F1/08;G03F9/00;G03H1/00;H01L21/027;(IPC1-7):G03F9/00
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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