RADIATION DETECTION DEVICE AND METHOD OF PRODUCING THE SAME

摘要

A radiation detection device comprising: a light receiving element array (6) formed by arranging two-dimensionally light receiving elements (2) on a substrate (1), arranging bonding pads (4) on the outer periphery of the substrate (1) and electrically connecting them to light receiving elements (2) of each row or column with signal lines (3), and disposing a protective passivation film (5) on the light receiving elements (2) and on the signal lines (3); a scintillator (7) of a CsI columnar crystal deposited on the light receiving surface of the light receiving element array (6); a thinly elongated resin frame (8) so disposed inside the bonding pads (4) as to encompass the outer periphery of the light receiving portion; and a protective film (12) formed by sandwiching an inorganic film (10) with Parillen organic films (9 and 11), and laminated inside the resin frame (8). The outer periphery of the protective film (12) is brought into close contact with the resin frame (8) by a covering resin (13).