发明名称 Halbleiterkörper
摘要 The invention relates to a semiconductor part comprising a semiconductor substrate (10) with a first oxide layer (14), a covering semiconductive layer (16) and a second oxide layer (18) arranged on top of the latter. In a contact hole area, said layers are penetrated by a first metallization layer (20) for contacting the semiconductor substrate (10). A phosphorus-doped oxide layer (22) is placed on the first metallization layer (20), which prevents mobile ions from penetrating into the first oxide layer (14) and the dielectric strength/drift resistance of the components integrated into the semiconductor part from being reduced.
申请公布号 DE19704534(A1) 申请公布日期 1998.08.20
申请号 DE1997104534 申请日期 1997.02.06
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 HAEBERLEN, OLIVER, DR.RER.NAT., VILLACH, AT;NELLE, PETER, DR.RER.NAT., 80993 MUENCHEN, DE
分类号 H01L29/06;H01L29/40;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/06
代理机构 代理人
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