MULTIPLE STAGE WET PROCESSING CHAMBER

摘要

An apparatus and method for performing multiple wet processing steps on objects placed within a sealed chamber. The apparatus (200) include a sealable chamber (10), at least one processing tank (12, 14) within the chamber, and preferably also includes an intrachamber robot (16) configured to move objects to be treated within the chamber (10). Preferred embodiments utilize at least two processing tanks (12, 14) within the chamber (10). During the use of these exemplary embodiments, objects to be treated are placed within the sealed chamber (10) and the chamber is sealed to create a sealed interior environment. The objects are immersed in a first treatment fluid which is in a first one of the tanks (12, 14), and then carried by the intrachamber robot (16) from the first to the second tank. The objects may be moved back and forth between the tanks (12, 14) as needed in order to complete the process being performed. After processing is complete, the chamber (10) is unsealed and the objects are removed from the chamber. In a preferred method, processing fluids are drained from the tanks (12, 14) at some point prior to the unsealing of the chamber (10) in order to substantially prevent passage of fumes to the outside environment or the contaminants from the exterior environment.