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发明名称
摘要
申请公布号
JP2789742(B2)
申请公布日期
1998.08.20
申请号
JP19890316652
申请日期
1989.12.05
申请人
NIPPON DENKI KK
发明人
HIURA JUKO
分类号
C30B25/04;C23C16/04;C23C16/48;C30B25/08;H01L21/205;H01L21/31;(IPC1-7):C23C16/04
主分类号
C30B25/04
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