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发明名称
Manufacturing method for a multigate thin film transistor
摘要
申请公布号
EP0494628(B1)
申请公布日期
1998.08.19
申请号
EP19920100128
申请日期
1992.01.07
申请人
CANON KABUSHIKI KAISHA
发明人
KONDO, SHIGEKI
分类号
H01L21/336;H01L29/786;(IPC1-7):H01L29/772
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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