| 摘要 |
A flatness measuring apparatus for a small diameter measurement surface includes a means for holding a workpiece; an intermediate probe held tiltably relative to the axial line of the measurement surface, and having at the lower end a measuring portion brought in contact with the measurement surface and at the upper end a horizontal flange having a diameter larger than that of the measuring portion; and at least three means for measuring the axial displacement of the flange by contact with the flange near the peripheral edge of the flange. Alternatively, the apparatus includes a chucking means for holding a workpiece; at least three measurement auxiliary units vertically movably supported by a stationary member provided over the workpiece and having, at the lower ends opposed to the measurement surface of the workpiece, respective rod-shaped contacts vertically abutted on the measurement surface at positions substantially equally spaced near the outer periphery of the measurement surface; and a means for detecting a vertical displacement of each measurement auxiliary unit by contact with the upper end of each measurement auxiliary unit. <IMAGE> |
