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发明名称
VAPOR PHASE EPITAXY SYSTEM
摘要
申请公布号
JPH10219453(A)
申请公布日期
1998.08.18
申请号
JP19970020568
申请日期
1997.02.03
申请人
SONY CORP
发明人
IMANISHI DAISUKE
分类号
C30B25/14;C23C16/44;C23C16/455;C30B29/40;H01L21/205;(IPC1-7):C23C16/44
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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