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发明名称
摘要
申请公布号	JPH10508434(A)	申请公布日期	1998.08.18
申请号	JP19970510038	申请日期	1996.08.26
申请人		发明人
分类号	H01L33/28;H01L33/40;H01S5/00;H01S5/327;(IPC1-7):H01L33/00;H01S3/18	主分类号	H01L33/28
代理机构		代理人
主权项
地址

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