Method and apparatus for controlling the acceleration energy of a radio-frequency multipole linear accelerator

摘要

A method for controlling a particle acceleration energy in a radio-frequency quadrupole accelerator, the method being particularly adapted for ion implantation in the process of manufacturing semiconductor devices, wherein the particle acceleration energy is varied without the necessity of changing the resonant frequency of the RFQ accelerator so that the final energy of the particles has a plurality of distinct energy having a lower value than the designed voltage.