发明名称 |
Zero dead-leg valve structure |
摘要 |
A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.
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申请公布号 |
US5794659(A) |
申请公布日期 |
1998.08.18 |
申请号 |
US19960777837 |
申请日期 |
1996.12.31 |
申请人 |
SCI SYSTEMS, INC.;BOC GROUP INC. |
发明人 |
DUROSS, RONALD R.;TUCKER, WILLIAM K. |
分类号 |
C23C16/44;F16K11/20;F16K11/22;F16K17/00;F16K27/00;F17D1/04;(IPC1-7):F16K11/20 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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