| 摘要 |
Disclosed is an attenuated phase shift reticle design having a compensating transmissive region located where side lobe ringing is anticipated to be most severe. Unlike other transmissive regions on the reticle, no integrated circuit features are defined at the location of the compensating transmissive region. Because the radiation giving rise to side lobe ringing is approximately 180 DEG out of phase with the radiation passing through transmissive regions, radiation passing through the compensating transmissive region will reduce side lobe intensity by destructively interfering with the out of phase radiation. A disclosed reticle defines a plurality of closely packed vias to be formed in a passivating layer. In the case of a positive resist, transmissive regions are provided at locations on the reticle design corresponding to positions of the vias on the passivating layer. A phase shift reticle having such via layout is expected to produce severe side lobe ringing in the regions surrounding the vias. Thus, a compensating transmissive region is placed around each of the via transmissive regions in the manner of a halo.
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