INSTALLATION METHOD AND DEVICE FOR FAN FILTER UNIT

摘要

PROBLEM TO BE SOLVED: To provide a method and device to easily install a fan filter unit. SOLUTION: Rails are formed along a ceiling frame 18 and a transporting truck 24, which can travel along the rails and hold a fan filter unit 12, is provided. An integration station 64 for fan filter units is formed on the frame 18 and a plurality of fan filter units 12 are integrated in the station 64. The fan filter unit 12 is mounted on the truck 24 and the truck 24 is caused to run along the rails to install the unit 12 at a required installation location.