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发明名称
BUBBLED CLEANING TANK
摘要
申请公布号
JPH10216662(A)
申请公布日期
1998.08.18
申请号
JP19970032915
申请日期
1997.01.31
申请人
TSUKASA GOMME DENZAI KK
发明人
SHIKURA MASAMI;ONODERA KIMIO
分类号
B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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