ELEMENT HAVING SURFACE FABRICATED BY MICROFABRICATING TECHNIQUE AND PREVENTING METHOD OF CONTAMINATION ON THAT ELEMENT SURFACE,申请号JP19970024690-传众专利搜索

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发明名称	ELEMENT HAVING SURFACE FABRICATED BY MICROFABRICATING TECHNIQUE AND PREVENTING METHOD OF CONTAMINATION ON THAT ELEMENT SURFACE
摘要
申请公布号	JPH10216668(A)	申请公布日期	1998.08.18
申请号	JP19970024690	申请日期	1997.02.07
申请人	TOKYO GAS CO LTD	发明人	ABE TAKESHI
分类号	B08B17/02;B81C99/00;H01L21/302;H01L21/3065;H01L49/00;(IPC1-7):B08B17/02;H01L21/306	主分类号	B08B17/02
代理机构		代理人
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