Sensor for rotational velocity and rotational acceleration

摘要

Novel rotation sensors are disclosed, sensors with a temporal resolution of one measurement per rotation. A transparent or absorbing substrate can be coated with a transparent thin film to produce a linear response in reflectance versus angle of incidence over a certain range of angles. The best results were obtained when the incident light was s-polarized. For example, a Si substrate coated with an SiO2 film was used in constructing a reflection rotation sensor. Experimental results and an error analysis of this rotation sensor are presented.