发明名称 |
Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus |
摘要 |
A method and a mechanism for lifting a gas flow-guide cylinder of a crystal pulling apparatus are disclosed. The crystal pulling apparatus includes a crucible for accommodating a crystalline material and for melting the crystalline material through heating, and a gas flow-guide cylinder capable of being moved upward/downward above the crucible. The crystal pulling apparatus is operated to grow a single crystal from the crystalline material by a pulling method. When a solid crystalline material is to be placed in the crucible, the gas flow-guide cylinder is moved upward to thereby separate the bottom end of the gas flow-guide cylinder away from the top portion of the crucible. This prevents the crystalline material from coming into contact with the gas flow-guide cylinder.
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申请公布号 |
US5795383(A) |
申请公布日期 |
1998.08.18 |
申请号 |
US19960760964 |
申请日期 |
1996.12.05 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
OKAMOTO, HIDEO;UESUGI, TOSHIHARU;IWASAKI, ATSUSHI;ODA, TETSUHIRO |
分类号 |
C30B15/00;C30B15/14;C30B15/32;C30B29/06;H01L21/208;(IPC1-7):C30B15/20 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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