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发明名称
CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
KR0121712(Y1)
申请公布日期
1998.08.17
申请号
KR19950001045U
申请日期
1995.01.24
申请人
SAMSUNG ELECTRONICS CO.,LTD
发明人
HAN, CHAN-HEE
分类号
H01L21/203;(IPC1-7):H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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