| 摘要 |
PROBLEM TO BE SOLVED: To perform the fine machining with the ultraviolet ray and visible ray with excellent accuracy by the simple equipment and at a low cost in a laser beam machine to perform the fine drilling in the organic materials such as the over coat of a color filter and a resin film of a semi-conductor multi- layer film. SOLUTION: A laser beam machine uses a compact Nd:YAG laser 100 as a light source of the ultraviolet and visible ray, and a laser beam oscillation part 1 can be integrated with a microscope part 2. Because an optical system 31a to transmit the light including the visible ray and the ultraviolet ray to the microscope part 2 is used, the ultraviolet ray is converged and a work is irradiated with the ultraviolet ray using the microscope part 2, and the irradiation position by the visible ray is monitored, and the magnified image can be observed by naked eyes. |
