QUARTZ TUBE FOR LPCVD,申请号KR19940029352U-传众专利搜索

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发明名称	QUARTZ TUBE FOR LPCVD
摘要
申请公布号	KR0119748(Y1)	申请公布日期	1998.08.17
申请号	KR19940029352U	申请日期	1994.11.05
申请人	LG SEMICONDUCTOR CO.,LTD	发明人	JUNG, KYUNG-CHOL
分类号	H01L21/18;(IPC1-7):H01L21/18	主分类号	H01L21/18
代理机构		代理人
主权项
地址

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