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发明名称
PROJECTIN EXPOSURE METHOD AND SYSTEM USED THEREFOR
摘要
申请公布号
KR0142645(B1)
申请公布日期
1998.08.17
申请号
KR19940003414
申请日期
1994.02.25
申请人
NEC CO.,LTD
发明人
TANABE, HIROYOSHI
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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