| 摘要 |
PROBLEM TO BE SOLVED: To provide a getter which captures hydrogen as uncle as possible and whose performance is not degraded by time and temp. as a device is deteriorated if hydrogen exists in the package of a semiconductor. SOLUTION: This method, apparatus and material are used for the hydrogen gettering associated with microelectronics and microwaves hermetically sealed in a hermetic container generally described as a 'package'. The gettering materials which may be used include titanium, zirconium, alloys of zirconium and vanadium and iron and zeolite having or without having hydrogen permeable films, i.e., coatings and several methods for coating the package with these materials are provided. Further, the hydrogen permeable materials may be used on the pores from the inside to the outside of the package. The hydrogen is emitted from the inside of the package when the hydrogen concn. in the package in higher than the concn. outside the package. |
