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发明名称
PATTERN FORMING METHOD, MANUFACTURING METHOD AND MASK THEREOF
摘要
申请公布号
KR0144942(B1)
申请公布日期
1998.08.17
申请号
KR19940024764
申请日期
1994.09.29
申请人
SAMSUNG ELECTRONICS CO.,LTD
发明人
LIM, SUNG-CHOOL;WOO, SANG-KYUN;MOON, SUNG-YONG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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