MICROMACHINING METHOD USING STAIN ETCHING PROCESS,申请号KR19940037888-传众专利搜索

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发明名称	MICROMACHINING METHOD USING STAIN ETCHING PROCESS
摘要
申请公布号	KR0143241(B1)	申请公布日期	1998.08.17
申请号	KR19940037888	申请日期	1994.12.28
申请人	SENSOR TECH RESEARCH CENTER OF KYUNGBOOK UNIVERSITY	发明人	LEE, JONG-HYUN;SHIN, JANG-KYU;RYU, INN-SIK
分类号	C23C18/16;(IPC1-7):C23C18/16	主分类号	C23C18/16
代理机构		代理人
主权项
地址

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