Improvements in or relating to Cathode Sputtering Apparatus,申请号GB19670005253-传众专利搜索

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发明名称	Improvements in or relating to Cathode Sputtering Apparatus
摘要
申请公布号	GB1169991(A)	申请公布日期	1969.11.12
申请号	GB19670005253	申请日期	1967.02.03
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人
分类号	C23C14/34;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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