| 摘要 |
PURPOSE:To improve the weatherability and to obtain the storage medium having high reliability and long life by providing a deformation preventive layer between the ceramics thin film formed by a sol-gel method and a reflecting film. CONSTITUTION:The sol-gel film 2 provided with guide grooves and pits written with information is formed of the compsn. expressed by I, is calcined to 200 nm film thickness and is thereby formed on a substrate 1 consisting of glass. The deformation preventive layer 3 is formed thereon by a plasma CVD device which forms a diamond-like film to 2 nm thickness. The Young's modulus of this carbon film is specified to 600 to 800 Gpa. An Au film having 150 nm film thickness is formed by a sputtering method on this deformation preventive layer 3, by which the reflecting film 4 is formed. The weatherability of the optical storage medium is greatly improved by providing the deformation preventive layer 3 between the sol-gel layer 2 and the reflecting film 4 in such a manner. The optical storage medium having the high reliability and the long life if thus obtd. |
