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发明名称
摘要
申请公布号	JP2786144(B2)	申请公布日期	1998.08.13
申请号	JP19960013867	申请日期	1996.01.30
申请人	KYUSHU NIPPON DENKI KK	发明人	KAYAMA MASAMI
分类号	C23C14/00;C23C14/34;H01L21/203;(IPC1-7):H01L21/203	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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