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发明名称
摘要
申请公布号	JP2785474(B2)	申请公布日期	1998.08.13
申请号	JP19900295772	申请日期	1990.10.31
申请人	MATSUSHITA DENKI SANGYO KK	发明人	YOSHIDA TAKAYUKI;HATADA KENZO
分类号	H01L21/60;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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