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发明名称
SiGe-SOI-MOSFET und Verfahren zur Herstellung
摘要
申请公布号
DE69316810(T2)
申请公布日期
1998.08.13
申请号
DE1993616810T
申请日期
1993.07.16
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
BURGHARTZ, JOACHIM N., SHRUB OAK, NEW YORK 10588, US;MEYERSON, BERNARD, YORKTOWN HEIGHTS, NEW YORK 10598, US;SUN, YAUN-CHEN, KATONAH, NEW YORK 10536, US
分类号
H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L29/772
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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