APPARATUS AND METHOD FOR OPTICAL SCANNING WITH AN OSCILLATORY MICROELECTROMECHANICAL SYSTEM

摘要

An optical scanning system includes a light source to generate a light beam and an oscillatory microelectromechanical system (50) including a mirror (52) that deflects the light beam in a predetermined manner. The light source and microelectromechanical system (50) are formed in a silicon substrate. Rotational shafts (70) in the microelectromechanical system facilitate oscillatory movement of the mirror (52).