发明名称 METHOD AND APPARATUS FOR DISPENSING LIQUIDS
摘要 A dispensing system and method for dispensing material onto a substrate. The dispensing system includes a housing, a dispensing apparatus coupled to the housing that dispenses a quantity of material, a support structure to support the substrate within the dispensing system, and a vibration system coupled to the support structure to vibrate the substrate to disperse the material. In embodiments of the dispensing system, a computer control system is used to control the dispensing apparatus in the vibration system. Further, in embodiments of the dispensing system, the vibration system is constructed and arranged to provide ultrasonic vibration.
申请公布号 WO9835377(A1) 申请公布日期 1998.08.13
申请号 WO1998US02104 申请日期 1998.02.05
申请人 CAMELOT SYSTEMS, INC. 发明人 CAVALLARO, WILLIAM;CARR, GREGORY, L.
分类号 H01L21/00;H01L21/56 主分类号 H01L21/00
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